Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit - Tango, Hiroyuki; (ed.) - Prospero Internet Bookshop
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Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit

From Mega-Bit to Giga-Bit
 
Edition number: 1
Publisher: CRC Press
Date of Publication:
 
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GBP 175.00
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91 875 HUF (87 500 HUF + 5% VAT)
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Short description:

This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies&&&8212;the longstanding technology driver of Si ULSI&&&8212;as they advance from the 1 Kbit to the Gbit DRAM era.

Long description:
This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies&&&8212;the longstanding technology driver of Si ULSI&&&8212;as they advance from the 1 Kbit to the Gbit DRAM era.
Table of Contents:
1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation