Product details:
| ISBN13: | 9780128178508 |
| ISBN10: | 0128178507 |
| Binding: | Paperback |
| No. of pages: | 448 pages |
| Size: | 235x191 mm |
| Weight: | 910 g |
| Language: | English |
| 156 |
Category:
Surface Metrology for Micro- and Nanofabrication
Series:
Micro and Nano Technologies;
Publisher: Elsevier
Date of Publication: 21 October 2020
Normal price:
Publisher's listprice:
EUR 193.00
EUR 193.00
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73 684 (70 175 HUF + 5% VAT )
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Long description:
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
- Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
- Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
- Assesses the best techniques for repairing micro-defects
Table of Contents:
1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness
